High repeatability performance
Assemble stage with ±1um repeatability performance for point to point application.
High Acceleration and Speed Performance
The stage can perform up to speed 5m/s and acceleration 30m/s².
Long Effective Stroke
The stage effective stroke from 200mm – 2700mm.
Support Multi Forcer
The Stage can design to become multi forcer axis in single track stage.
Semiconductor inspection machine, precision machining machines, laser cutting machines, Automatic equipment, High speed transfer equipment, Measuring equipment.