RWD Series Wafer Robot

RWD Series Wafer Robot

FEATURES

  • The advantage is on vertical integration of both hardware and software, also using high precision and stiffness DD motor, the repeatability can reach ±0.02mm. Small circling radial and high utilization of space.
  • Applications include: Pick –and –place equipment in Semiconductor industry(pick-and place of wafer),Optoelectronics(mini panel, mini solar panel)and LED industry(sapphire substrate, rubber ring).
  • Various options for end effectors such as vacuum type, gripping type and flipping type. Able to provide total solution to adapt to all kinds of customer applications.
RWS Series
RWD Series
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