NPS Stage

Category:

Linear Motor NPS Stage

FEATURES

Compact Design

Low profile design.

High Precision Stage

±0.2um Repeatability and ±1um Absolute Accuracy

High Precision Ground Ballscrew or Ironless Linear Motor

Option for selection with ballscrew or linear motor.

Cross Roller Bearing

Using high stiffness crossed roller bearing.

APPLICATIONS

Semiconductor inspection machine, precision machining machines, laser cutting machines, Automatic equipment, High speed transfer equipment, Measuring equipment.

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