LMSSA Stage

Category:

Linear Motor LMSSA Stage

FEATURES

High repeatability performance

Assemble stage with ±1um repeatability performance for point to point application.

High Acceleration and Speed Performance

The stage can perform up to speed 5m/s and acceleration 30m/s².

Long Effective Stroke

The stage effective stroke from 200mm – 2700mm.

Support Multi Forcer

The Stage can design to become multi forcer axis in single track stage.

APPLICATIONS

Semiconductor inspection machine, precision machining machines, laser cutting machines, Automatic equipment, High speed transfer equipment, Measuring equipment.

wdt_IDNameCategoryProduct