Air Bearing Stage


Linear Motor Air Bearing Stage


Non-contact Air Bearing Provides Better Positioning Accuracy

Not mechanical contact between the moving platform and base. Not mechanical bearing backlash issue and perform better positioning accuracy.

Embedded Magnetic Preloading Design, Enhance Stability

Magnetic preload between the stator and moving platform to perform better stability.

Provide Extremely Smooth Motion and Rapid Settling Time

Due to smooth motion can perform must better motion control with low rapid settling time.

Equipped with Ironless Linear Motor, No Cogging

Not cogging force and suitable for scanning with over fly application.

High Resolution Feedback with Linear Optical Encoder

Using high resolution optical linear encoder to perform better accuracy and repeatability.


Semiconductor inspection machine, high precision machining machines, laser cutting machines, Measuring equipment.